发明申请
- 专利标题: SPUTTERING TARGET FIXTURE
- 专利标题(中): 喷射目标
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申请号: US10711818申请日: 2004-10-07
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公开(公告)号: US20060076230A1公开(公告)日: 2006-04-13
- 发明人: William Murphy , David Strippe
- 申请人: William Murphy , David Strippe
- 申请人地址: US NY Armonk
- 专利权人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人: INTERNATIONAL BUSINESS MACHINES CORPORATION
- 当前专利权人地址: US NY Armonk
- 主分类号: C23C14/00
- IPC分类号: C23C14/00
摘要:
A method and apparatus for sputter deposition. The method including: providing a sputter target having a back surface and an exposed front surface; providing a source of magnetic field lines, the magnetic field lines extending through the sputter target from the back surface to the exposed front surface of the sputter target; providing one or more pole extenders between magnetic poles of the source of the magnetic field lines and the exposed front surface of the sputter target.
公开/授权文献
- US07485210B2 Sputtering target fixture 公开/授权日:2009-02-03
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