发明申请
US20060076230A1 SPUTTERING TARGET FIXTURE 失效
喷射目标

SPUTTERING TARGET FIXTURE
摘要:
A method and apparatus for sputter deposition. The method including: providing a sputter target having a back surface and an exposed front surface; providing a source of magnetic field lines, the magnetic field lines extending through the sputter target from the back surface to the exposed front surface of the sputter target; providing one or more pole extenders between magnetic poles of the source of the magnetic field lines and the exposed front surface of the sputter target.
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