发明申请
US20060076965A1 Contact-free test system for semiconductor device 审中-公开
无接触式半导体器件测试系统

Contact-free test system for semiconductor device
摘要:
The present invention provides a contact-free test system for testing a semiconductor device. The contact-free test system comprises a test signal member applying a test signal to the semiconductor device, an electronic beam radiator generating a first electronic beam and radiating it to an area of the semiconductor device, a detector to detect a second electronic beam reflected from the semiconductor device, and a comparator to compare the test signal with the second electronic beam.
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