发明申请
- 专利标题: Contact-free test system for semiconductor device
- 专利标题(中): 无接触式半导体器件测试系统
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申请号: US11147437申请日: 2005-06-08
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公开(公告)号: US20060076965A1公开(公告)日: 2006-04-13
- 发明人: Young-Soo An , Hun-Kyo Seo , Hyun-Seop Shim , Jeong-Seon Kim , Ki-Don Hong , Tcherniak Valeri
- 申请人: Young-Soo An , Hun-Kyo Seo , Hyun-Seop Shim , Jeong-Seon Kim , Ki-Don Hong , Tcherniak Valeri
- 优先权: KR2004-0081308 20041012
- 主分类号: G01R31/305
- IPC分类号: G01R31/305
摘要:
The present invention provides a contact-free test system for testing a semiconductor device. The contact-free test system comprises a test signal member applying a test signal to the semiconductor device, an electronic beam radiator generating a first electronic beam and radiating it to an area of the semiconductor device, a detector to detect a second electronic beam reflected from the semiconductor device, and a comparator to compare the test signal with the second electronic beam.
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