Invention Application
- Patent Title: HEAT SHIELD AND CRYSTAL GROWTH EQUIPMENT
- Patent Title (中): 热风和晶体生长设备
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Application No.: US11163855Application Date: 2005-11-01
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Publication No.: US20060090695A1Publication Date: 2006-05-04
- Inventor: Jyh-Chen Chen , Bing-Jung Chen , Gwo-Jiun Sheu , Farn-Shiun Hwu
- Applicant: Jyh-Chen Chen , Bing-Jung Chen , Gwo-Jiun Sheu , Farn-Shiun Hwu
- Priority: TW93133599 20041104
- Main IPC: C30B15/00
- IPC: C30B15/00 ; C30B21/06 ; C30B13/00 ; C30B21/04 ; C30B27/02 ; C30B28/08 ; C30B28/10 ; C30B30/04

Abstract:
A heat shield and a crystal growth equipment are provided, in which the length-adjustable and hybrid-angle heat shield is provided for the crystal growth equipments. The heat shield is adapted for not only guiding the inert gas flow but also speeding up the flow rate of the gas and the cooling rate of the crystal so as to raise the axial temperature gradient at the solid-molten interface, the growth rate of the crystal and the productivity. The heat shield further can also reduce the possibility of microdefect nucleation to improve the quality of crystal at the same time. In addition, the length of heat shield can be adjusted according to the distance between the heat shield and the semiconductor material melt in different crucibles in case that the crucibles are made by different factories. This can reduce the cost of the heat shield manufacturing.
Public/Granted literature
- US07291225B2 Heat shield and crystal growth equipment Public/Granted day:2007-11-06
Information query
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