发明申请
- 专利标题： Heating crucible and deposition apparatus including the same
- 专利标题（中）： 加热坩埚和包括其的沉积设备
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申请号： US11266397申请日： 2005-11-04
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公开(公告)号： US20060096542A1公开(公告)日： 2006-05-11
- 发明人: Seoung-Yoon Ryu , Kyong-Tac Yu , Sung-Rag Ma
- 申请人： Seoung-Yoon Ryu , Kyong-Tac Yu , Sung-Rag Ma
- 专利权人： Samsung SDI Co., Ltd.
- 当前专利权人： Samsung SDI Co., Ltd.
- 优先权： KR10-2004-0089650 20041105
- 主分类号： C23C16/00
- IPC分类号： C23C16/00
摘要：
A heating crucible and a deposition apparatus are provided that have a uniform deposition rate and good reproducibility. The heating crucible of the deposition apparatus includes a titanium body with an internal cavity to contain a material to be deposited and an opening to emit the material to be deposited, a wire to heat the body, and an insulator to insulate the body from the wire.
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