发明申请
- 专利标题: Method of ultrasonic mounting and ultrasonic mounting apparatus using the same
- 专利标题(中): 超声波安装方法及使用其的超声波安装装置
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申请号: US11062789申请日: 2005-02-23
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公开(公告)号: US20060097028A1公开(公告)日: 2006-05-11
- 发明人: Norio Kainuma , Hidehiko Kira , Kenji Kobae , Takayoshi Matsumura
- 申请人: Norio Kainuma , Hidehiko Kira , Kenji Kobae , Takayoshi Matsumura
- 专利权人: Fujitsu Limited
- 当前专利权人: Fujitsu Limited
- 优先权: JP2004-325281 20041109
- 主分类号: B23K1/06
- IPC分类号: B23K1/06
摘要:
A method of ultrasonic mounting can increase mounting efficiency by using high-frequency ultrasound and can also mount large semiconductor chips. The method ultrasonically bonds a semiconductor chip 52 to a substrate 50 using an ultrasonic mounting apparatus including a horn 15 that propagates ultrasonic vibration of an ultrasonic vibrator, the horn 15 being made of a ceramic that has a higher vibration propagation speed than metal. The method includes steps of disposing the substrate 50 on a stage 13, disposing the semiconductor chip 52 on the substrate 50, and placing the semiconductor chip 52 in contact with a convex part 15a provided on the horn 15 and applying ultrasonic vibration to bond the semiconductor chip 52 to the substrate 50.
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