发明申请
- 专利标题： Elevator-based tool loading and buffering system
- 专利标题（中）： 电梯工具装载和缓冲系统
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申请号： US11210918申请日： 2005-08-23
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公开(公告)号： US20060099054A1公开(公告)日： 2006-05-11
- 发明人: Gerald Friedman , Michael Bufano , Christopher Hofmeister , Ulysses Gilchrist , William Fosnight
- 申请人： Gerald Friedman , Michael Bufano , Christopher Hofmeister , Ulysses Gilchrist , William Fosnight
- 主分类号： H01L21/677
- IPC分类号： H01L21/677
摘要：
A substrate processing apparatus is provided. The apparatus has a casing, a low port interface and a carrier holding station. The casing has processing devices within for processing substrates. The load port interface is connected to the casing for loading substrates into the processing device. The carrier holding station is connected to the casing. The carrier holding station is adapted for holding at least one substrate transport carrier at the load port interface. The carrier holding station is arranged to provide a fast swap section for replacement of the substrate transport carrier from the carrier holding station.
公开/授权文献
- US07806643B2 Elevator-based tool loading and buffering system 公开/授权日：2010-10-05
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