公开(公告)号：US20060099054A1

公开(公告)日：2006-05-11

申请号：US11210918

申请日：2005-08-23

申请人： Gerald Friedman ,  Michael Bufano ,  Christopher Hofmeister ,  Ulysses Gilchrist ,  William Fosnight

发明人： Gerald Friedman ,  Michael Bufano ,  Christopher Hofmeister ,  Ulysses Gilchrist ,  William Fosnight

IPC分类号： H01L21/677

CPC分类号： H01L21/677 ,  B65G47/50 ,  H01L21/67276 ,  H01L21/67769 ,  H01L21/67772 ,  H01L21/67775 ,  Y10S414/14

摘要： A substrate processing apparatus is provided. The apparatus has a casing, a low port interface and a carrier holding station. The casing has processing devices within for processing substrates. The load port interface is connected to the casing for loading substrates into the processing device. The carrier holding station is connected to the casing. The carrier holding station is adapted for holding at least one substrate transport carrier at the load port interface. The carrier holding station is arranged to provide a fast swap section for replacement of the substrate transport carrier from the carrier holding station.

摘要翻译： 提供了一种基板处理装置。 该装置具有壳体，低端口接口和载体保持站。 壳体具有用于处理基板的处理装置。 负载端口接口连接到外壳，用于将基板装载到处理设备中。 托架保持站连接到外壳。 载体保持站用于在负载端口接口处保持至少一个基板传输载体。 载体保持站布置成提供用于从载体保持站更换基板传输载体的快速互换部分。

公开(公告)号：US20060088272A1

公开(公告)日：2006-04-27

申请号：US11207231

申请日：2005-08-19

申请人： Ulysses Gilchrist ,  William Fosnight ,  Christopher Hofmeister ,  Gerald Friedman ,  Michael Bufano

发明人： Ulysses Gilchrist ,  William Fosnight ,  Christopher Hofmeister ,  Gerald Friedman ,  Michael Bufano

IPC分类号： G02B6/00

CPC分类号： H01L21/67763 ,  H01L21/67326 ,  H01L21/67353 ,  H01L21/67369 ,  H01L21/67373 ,  H01L21/67376 ,  H01L21/67383 ,  H01L21/67389 ,  H01L21/67393 ,  H01L21/67772 ,  H01L21/67778 ,  H01L21/6779 ,  Y10S414/139

摘要： A substrate transport apparatus is provided. The apparatus has a casing and a door. The casing is adapted to form a controlled environment therein. The casing has supports therein for holding at least one substrate in the casing. The casing defines a substrate transfer opening through which a substrate transport system accesses the substrate in the casing. The door is connected to the casing for closing the substrate transfer opening in the casing. The casing has structure forming a fast swap element allowing replacement of the substrate from the apparatus with another substrate without retraction of the substrate transport system and independent of substrate loading in the casing.

摘要翻译： 提供了基板输送装置。 该装置具有外壳和门。 壳体适于在其中形成受控的环境。 壳体具有用于在壳体中保持至少一个基板的支撑。 壳体限定衬底传送开口，衬底传送系统通过该衬底传送系统访问壳体中的衬底。 门连接到壳体以封闭壳体中的基板传送开口。 壳体具有形成快速互换元件的结构，其允许用另一个基板从设备更换基板，而不会退回基板输送系统，而与壳体中的基板负载无关。

公开(公告)号：US20060104712A1

公开(公告)日：2006-05-18

申请号：US11211236

申请日：2005-08-24

申请人： Michael Bufano ,  Gerald Friedman ,  Christopher Hofmeister ,  Ulysses Gilchrist ,  William Fosnight

发明人： Michael Bufano ,  Gerald Friedman ,  Christopher Hofmeister ,  Ulysses Gilchrist ,  William Fosnight

IPC分类号： E01C1/00

CPC分类号： H01L21/67715 ,  H01L21/67736 ,  H01L21/67775

摘要： An exemplary embodiment a substrate transport system is provided. The system has a guideway and at least one transport vehicle. The transport vehicle is adapted for holding at least one substrate and capable of being supported from and moving along the guideway. The guideway comprises at least one travel lane for the vehicle and at least one access lane offset from the travel lane allowing the vehicle selectable access on and off the travel lane.

摘要翻译： 提供了一种示例性实施例的基板输送系统。 该系统具有导轨和至少一个运输车辆。 运输车辆适于保持至少一个基底并且能够被支撑并沿导轨移动。 导轨包括用于车辆的至少一个行驶车道和从行驶车道偏移的至少一个通道，允许车辆可选择地接近行驶车道和离开行车道。

公开(公告)号：US20080080963A1

公开(公告)日：2008-04-03

申请号：US11803077

申请日：2007-05-11

申请人： Michael Bufano ,  Ulysses Gilchrist ,  William Fosnight ,  Christopher Hofmeister ,  Daniel Babbs ,  Robert May

发明人： Michael Bufano ,  Ulysses Gilchrist ,  William Fosnight ,  Christopher Hofmeister ,  Daniel Babbs ,  Robert May

IPC分类号： B65B35/00

CPC分类号： H01L21/6732 ,  H01L21/67017 ,  H01L21/67276 ,  H01L21/67379 ,  H01L21/67386 ,  H01L21/67715 ,  H01L21/67727 ,  H01L21/6773 ,  H01L21/67733 ,  H01L21/67736 ,  H01L21/67769 ,  H01L21/67775 ,  H01L21/67778

摘要： A semiconductor workpiece processing system having at least one processing apparatus for processing workpieces, a primary transport system, a secondary transport system and one or more interfaces between first transport system and second transport system. The primary and secondary transport systems each have one or more sections of substantially constant velocity and in queue sections communicating with the constant velocity sections.

公开(公告)号：US20080063496A1

公开(公告)日：2008-03-13

申请号：US11891835

申请日：2007-08-13

申请人： Michael Bufano ,  Ulysses Gilchrist ,  William Fosnight ,  Christopher Hofmeister ,  Daniel Babbs ,  Robert May

发明人： Michael Bufano ,  Ulysses Gilchrist ,  William Fosnight ,  Christopher Hofmeister ,  Daniel Babbs ,  Robert May

IPC分类号： B65G1/00

CPC分类号： H01L21/67733 ,  H01L21/67017 ,  H01L21/67126 ,  H01L21/67201 ,  H01L21/67276 ,  H01L21/67376 ,  H01L21/67379 ,  H01L21/67386 ,  H01L21/677 ,  H01L21/67706 ,  H01L21/67715 ,  H01L21/67724 ,  H01L21/67727 ,  H01L21/6773 ,  H01L21/67736 ,  H01L21/67757 ,  H01L21/67766 ,  H01L21/67769 ,  H01L21/67772 ,  H01L21/67775

摘要： In accordance with an exemplary embodiment a semiconductor workpiece processing system having at least one processing tool for processing semiconductor workpieces, a container for holding at least one semiconductor workpiece therein for transport to and from the at least one processing tool and a first transport section elongated and defining a travel direction. The first transport section has parts, that interface the container, supporting and transporting the container along the travel direction to and from the at least one processing tool. The container is in substantially continuous transport at a substantially constant rate in the travel direction, when supported by the first transport section. A second transport section is connected to the at least one process tool for transporting the container to and from the at least one processing tool.

摘要翻译： 根据示例性实施例，半导体工件处理系统具有至少一个用于处理半导体工件的处理工具，用于将至少一个半导体工件保持在其中以用于传送至至少一个处理工具和从该至少一个处理工具传送的容器和第一传送部分 定义旅行方向。 第一运输部分具有与集装箱接合的部件，沿着行进方向将容器支撑和运输到至少一个加工工具和从该至少一个加工工具运送。 当由第一输送部支撑时，容器以行进方向以基本上恒定的速度基本上连续输送。 第二传送部分连接到至少一个处理工具，用于将容器运送到至少一个处理工具和从该至少一个处理工具传送。

公开(公告)号：US20070189880A1

公开(公告)日：2007-08-16

申请号：US11594365

申请日：2006-11-07

申请人： Michael Bufano ,  Ulysses Gilchrist ,  William Fosnight ,  Christopher Hofmeister ,  Daniel Babbs ,  Robert May

发明人： Michael Bufano ,  Ulysses Gilchrist ,  William Fosnight ,  Christopher Hofmeister ,  Daniel Babbs ,  Robert May

IPC分类号： H01L21/677

CPC分类号： H01L21/67769 ,  H01L21/67376 ,  H01L21/67386 ,  H01L21/67715 ,  H01L21/67724 ,  H01L21/67727 ,  H01L21/6773 ,  H01L21/67733 ,  H01L21/67736 ,  H01L21/67778

摘要： A semiconductor workpiece processing system having at least one processing apparatus for processing workpieces, a primary transport system, a secondary transport system and one or more interfaces between first transport system and second transport system. The primary and secondary transport systems each have one or more sections of substantially constant velocity and in queue sections communicating with the constant velocity sections.

摘要翻译： 一种半导体工件处理系统，具有至少一个用于处理工件的处理装置，主输送系统，辅助输送系统以及第一输送系统和第二输送系统之间的一个或多个接口。 主要和次要运输系统各自具有基本上恒定速度的一个或多个部分和与等速段相通的队列部分。

公开(公告)号：US20070201967A1

公开(公告)日：2007-08-30

申请号：US11556584

申请日：2006-11-03

申请人： Michael Bufano ,  Ulysses Gilchrist ,  William Fosnight ,  Christopher Hofmeister ,  Daniel Babbs ,  Robert May

发明人： Michael Bufano ,  Ulysses Gilchrist ,  William Fosnight ,  Christopher Hofmeister ,  Daniel Babbs ,  Robert May

IPC分类号： B65H1/00

CPC分类号： H01L21/67379 ,  H01L21/67715 ,  H01L21/67727 ,  H01L21/6773 ,  H01L21/67733 ,  H01L21/67736 ,  H01L21/67772 ,  H01L21/67775

摘要： A semiconductor workpiece processing system having at least one processing apparatus for processing workpieces, a primary transport system, a secondary transport system and one or more interfaces between first transport system and second transport system. The primary and secondary transport systems each have one or more sections of substantially constant velocity and in queue sections communicating with the constant velocity sections.

摘要翻译： 一种半导体工件处理系统，具有至少一个用于处理工件的处理装置，主输送系统，辅助输送系统以及第一输送系统和第二输送系统之间的一个或多个接口。 主要和次要运输系统各自具有基本上恒定速度的一个或多个部分和与等速段相通的队列部分。

公开(公告)号：US20110142575A1

公开(公告)日：2011-06-16

申请号：US12897440

申请日：2010-10-04

申请人： Gerald M. Friedman ,  Michael L. Bufano ,  Christopher Hofmeister ,  Ulysses Gilchrist ,  William Fosnight

发明人： Gerald M. Friedman ,  Michael L. Bufano ,  Christopher Hofmeister ,  Ulysses Gilchrist ,  William Fosnight

IPC分类号： H01L21/677

CPC分类号： H01L21/677 ,  B65G47/50 ,  H01L21/67276 ,  H01L21/67769 ,  H01L21/67772 ,  H01L21/67775 ,  Y10S414/14

摘要： A substrate processing apparatus is provided. The apparatus has a casing, a low port interface and a carrier holding station. The casing has processing devices within for processing substrates. The load port interface is connected to the casing for loading substrates into the processing device. The carrier holding station is connected to the casing. The carrier holding station is adapted for holding at least one substrate transport carrier so the at least one substrate transport carrier is capable of being coupled to the load port interface without lifting the at least one substrate transport carrier off the carrier holding station. The carrier holding station is arranged to provide a substantially simultaneous swap section for substantially simultaneous replacement of the substrate transport carrier from the carrier holding station.

摘要翻译： 提供了一种基板处理装置。 该装置具有壳体，低端口接口和载体保持站。 壳体具有用于处理基板的处理装置。 负载端口接口连接到外壳，用于将基板装载到处理设备中。 托架保持站连接到外壳。 载体保持站用于保持至少一个基板输送载体，使得至少一个基板输送载体能够耦合到负载端口接口，而不将至少一个基板传输载体从载体保持站提起。 载体保持站布置成提供基本上同时的交换部分，用于基本上同时从载体保持站更换基板传输载体。

公开(公告)号：US07607879B2

公开(公告)日：2009-10-27

申请号：US11154787

申请日：2005-06-15

申请人： Daniel A. Hall ,  Christopher Hofmeister ,  William Fosnight ,  Robert T. Caveney ,  Ulysses Gilchrist ,  Jeff G. Araujo

发明人： Daniel A. Hall ,  Christopher Hofmeister ,  William Fosnight ,  Robert T. Caveney ,  Ulysses Gilchrist ,  Jeff G. Araujo

IPC分类号： B65G49/07

CPC分类号： H01L21/67196 ,  Y10S414/135

摘要： A substrate processing apparatus having a frame, a housing, an access system and at least a substrate transport apparatus or a substrate processing device. The housing is connected to the frame. The access system is connected to the frame and forms an access through which substrates are moved in and out of the housing. The substrate transport apparatus or substrate processing device are connected to the frame and are at least partially positioned in the housing. The frame comprises a movable portion. The movable portion is movable relative to the frame so that movement of the movable portion causes separation of the access system and at least one of the substrate transport apparatus or substrate processing device from an installed position. The substrate transport apparatus is selectable from a number of different interchangeable substrate transport apparatus. Each of the different interchangeable substrate transport apparatus has a predetermined reference datum and positioning features for positioning the substrate transport apparatus relative to the frame. The positioning features of each substrate transport apparatus are controllably located relative to its predetermined reference datum to be in a repeatable predetermined location with substantially no variance between the different interchangeable substrate transport apparatus.

摘要翻译： 一种具有框架，壳体，存取系统和至少基板输送装置或基板处理装置的基板处理装置。 外壳连接到框架。 存取系统连接到框架并形成一个通路，通过该通道使基板移入和移出外壳。 基板输送装置或基板处理装置连接到框架并且至少部分地定位在壳体中。 框架包括可移动部分。 可移动部分可相对于框架移动，使得可移动部分的运动导致进入系统和基板输送装置或基板处理装置中的至少一个与安装位置的分离。 基板输送装置可从许多不同的可互换的基板输送装置中选择。 每个不同的可互换的基板输送装置具有预定的参考基准和用于相对于框架定位基板输送装置的定位特征。 每个基板输送装置的定位特征可相对于其预定参考基准可控地定位成处于可重复的预定位置，在不同的可互换的基板输送装置之间基本上没有变化。

公开(公告)号：US08328495B2

公开(公告)日：2012-12-11

申请号：US12544064

申请日：2009-08-19

申请人： Michael L. Bufano ,  Ulysses Gilchrist ,  William Fosnight ,  Christopher Hofmeister ,  Daniel Babbs ,  Robert C. May

发明人： Michael L. Bufano ,  Ulysses Gilchrist ,  William Fosnight ,  Christopher Hofmeister ,  Daniel Babbs ,  Robert C. May

IPC分类号： B65G1/00

CPC分类号： H01L21/67386 ,  H01L21/67196 ,  H01L21/67201 ,  H01L21/67276 ,  H01L21/67379 ,  H01L21/67715 ,  H01L21/67724 ,  H01L21/67727 ,  H01L21/6773 ,  H01L21/67733 ,  H01L21/67766 ,  H01L21/67772 ,  H01L21/67775

摘要： A semiconductor workpiece processing system having at least one processing apparatus for processing workpieces, a primary transport system, a secondary transport system and one or more interfaces between first transport system and second transport system. The primary and secondary transport systems each have one or more sections of substantially constant velocity and in queue sections communicating with the constant velocity sections.

摘要翻译： 一种半导体工件处理系统，具有至少一个用于处理工件的处理装置，主输送系统，辅助输送系统以及第一输送系统和第二输送系统之间的一个或多个接口。 主要和次要运输系统各自具有基本上恒定速度的一个或多个部分和与等速段相通的队列部分。