发明申请
US20060109014A1 Test pad and probe card for wafer acceptance testing and other applications
审中-公开
测试垫和探针卡,用于晶圆验收测试等应用
- 专利标题: Test pad and probe card for wafer acceptance testing and other applications
- 专利标题(中): 测试垫和探针卡,用于晶圆验收测试等应用
-
申请号: US10996242申请日: 2004-11-23
-
公开(公告)号: US20060109014A1公开(公告)日: 2006-05-25
- 发明人: Te-Tsung Chao , Chao-Yuan Su , Pei-Haw Tsao , Chender Huang
- 申请人: Te-Tsung Chao , Chao-Yuan Su , Pei-Haw Tsao , Chender Huang
- 主分类号: G01R31/02
- IPC分类号: G01R31/02
摘要:
A probe card having a member for sending and receiving electrical signals for operational testing of a semiconductor integrated circuit, and a plurality of probe pins extending from the member in a manner which causes free ends of the pins to contact wafer test pads substantially across a maximum dimension of the pads. Also, a test pad for a wafer or a substrate having a pad of electrically conductive material disposed in an area between seal rings of the wafer or substrate, the pad having a shape and/or a rotational orientation within the area between the seal rings that minimizes pad material immediately adjacent the seal rings. Further, a test pad for a wafer or substrate including a passivation layer disposed thereover, the test pad formed of a layer of electrically conductive material and disposed in an opening in the passivation layer, the opening disposed over an uppermost metal layer of the wafer or substrate, the opening and the test pad dimensioned so that the test pad does not contact the passivation layer. Still further, a protection structure for a wafer die core comprising a wafer including a passivation layer and a test pad extending through the passivation layer, and a trench in the passivation layer adjacent to an edge of the test pad.
信息查询