发明申请
US20060117845A1 Tilt-insensitive flow sensor 有权
倾斜不敏感流量传感器

Tilt-insensitive flow sensor
摘要:
A flow sensor is provided having a substrate with a sensing element and flow channel over the sensing element. The sensing element senses at least one property of a fluid. The flow channel is configured such that tilting the flow sensor does not have a significant effect on the measured signal. A device for measuring tilt in a system having a fluid flow path is also provided.
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