发明申请
- 专利标题: Tilt-insensitive flow sensor
- 专利标题(中): 倾斜不敏感流量传感器
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申请号: US11005968申请日: 2004-12-07
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公开(公告)号: US20060117845A1公开(公告)日: 2006-06-08
- 发明人: Aravind Padmanabhan , Ernest Satren , Ulrich Bonne , Robert Higashi
- 申请人: Aravind Padmanabhan , Ernest Satren , Ulrich Bonne , Robert Higashi
- 主分类号: G01F1/68
- IPC分类号: G01F1/68
摘要:
A flow sensor is provided having a substrate with a sensing element and flow channel over the sensing element. The sensing element senses at least one property of a fluid. The flow channel is configured such that tilting the flow sensor does not have a significant effect on the measured signal. A device for measuring tilt in a system having a fluid flow path is also provided.
公开/授权文献
- US07331224B2 Tilt-insensitive flow sensor 公开/授权日:2008-02-19