发明申请
- 专利标题: Transfer device of handler for testing semiconductor device
- 专利标题(中): 用于半导体器件测试的处理器的传送装置
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申请号: US11200014申请日: 2005-08-10
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公开(公告)号: US20060119345A1公开(公告)日: 2006-06-08
- 发明人: Chul Ham , Woo Lim , Young Park , Ho Song
- 申请人: Chul Ham , Woo Lim , Young Park , Ho Song
- 专利权人: MIRAE CORPORATION
- 当前专利权人: MIRAE CORPORATION
- 优先权: KR2004-101753 20041206
- 主分类号: G01R31/28
- IPC分类号: G01R31/28
摘要:
The present invention relates to a transfer device of a handler for testing semiconductor device in which a pitch between each head of picker heads may be adjusted to the discretionary one as wanted without replacing a cam plate. The transfer device of a handler for testing semiconductor device comprises a base part, a plurality of picker heads mounted movable horizontally on the base part for securing/detaching the semiconductors, a cam plate movably mounted on the base part, a plurality of cam grooves formed inclined therein, connection parts, wherein each first side thereof is secured to each picker head and each second side thereof is relative-movably connected to each cam groove, thereby connecting each picker head with each cam groove, and a driving unit for reciprocating the cam plate so as that the picker heads may be varied to a discretionary position of the base part.
公开/授权文献
- US07464807B2 Transfer device of handler for testing semiconductor device 公开/授权日:2008-12-16