发明申请
- 专利标题: NON-VOLATILE MEMORY AND METHOD FOR FABRICATING THE SAME
- 专利标题(中): 非易失性存储器及其制造方法
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申请号: US11018507申请日: 2004-12-20
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公开(公告)号: US20060134866A1公开(公告)日: 2006-06-22
- 发明人: Erh-Kun Lai , Hang-Ting Lue , Yen-Hao Shih , Chia-Hua Ho
- 申请人: Erh-Kun Lai , Hang-Ting Lue , Yen-Hao Shih , Chia-Hua Ho
- 主分类号: H01L21/336
- IPC分类号: H01L21/336 ; H01L21/3205
摘要:
A non-volatile memory is provided. The memory comprises a substrate, a dielectric layer, a conductive layer, an isolation layer, a buried bit line, a tunneling dielectric layer, a charge trapping layer, a barrier dielectric layer and a word line. Wherein, the dielectric layer is disposed on the substrate. The conductive layer is disposed on the dielectric layer. The isolation layer is disposed on the substrate and adjacent to the dielectric layer and the conductive layer. The buried bit line is disposed in the substrate and underneath the isolation layer. The tunneling dielectric layer is disposed on both the substrate and the sidewalls of the conductive layer and the isolation layer. The charge trapping layer is disposed on the tunneling dielectric layer and the barrier dielectric layer is disposed on the charge trapping layer. The word line is disposed on the substrate, crisscrossing with the buried bit line.
公开/授权文献
- US07067375B1 Non-volatile memory and method for fabricating the same 公开/授权日:2006-06-27
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