发明申请
US20060147646A1 Deposition system using noise canceller and its method of control
有权
使用噪声消除器的沉积系统及其控制方法
- 专利标题： Deposition system using noise canceller and its method of control
- 专利标题（中）： 使用噪声消除器的沉积系统及其控制方法
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申请号： US11324344申请日： 2006-01-04
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公开(公告)号： US20060147646A1公开(公告)日： 2006-07-06
- 发明人: Min-Jeong Hwang
- 申请人： Min-Jeong Hwang
- 优先权： KR10-2005-0001086 20050106; KR10-2005-0001087 20050106; KR10-2005-0001088 20050106
- 主分类号： B05C5/00
- IPC分类号： B05C5/00 ; C23C14/00 ; B05C11/00
摘要：
A deposition system and its method of control cancels the influence of noise occurring during measuring of a deposition rate using a noise canceller in order to exactly control the deposition rate, and obtains a film of a desired thickness. The deposition system includes a deposition device. A deposition rate sensor measures a deposition rate of the deposition device. A noise canceller cancels a noise component of the measured deposition rate. A power supply unit adjusts power supplied to the deposition device according to an output of the noise canceller.