发明申请
- 专利标题： Tubular sputtering target
- 专利标题（中）： 管状溅射靶
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申请号： US11293544申请日： 2005-12-02
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公开(公告)号： US20060151320A1公开(公告)日： 2006-07-13
- 发明人: Martin Weigert , Markus Schultheis , Martin Schlott , Christoph Simons
- 申请人： Martin Weigert , Markus Schultheis , Martin Schlott , Christoph Simons
- 优先权： DE102004058316.1 20041202
- 主分类号： C23C14/00
- IPC分类号： C23C14/00
摘要：
A tubular sputtering target with a target body and with an attachment device arranged at at least one end of the target body. The attachment device and/or an end cover are joined with the target body by material joining or positive locking.
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