- 专利标题： Position measurement method, position control method, measurement method, loading method, exposure method and exposure apparatus, and device manufacturing method
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申请号： US11281544申请日： 2005-11-18
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公开(公告)号： US20060158632A1公开(公告)日： 2006-07-20
- 发明人: Masahiko Yasuda , Taro Sugihara
- 申请人： Masahiko Yasuda , Taro Sugihara
- 申请人地址： JP Tokyo
- 专利权人： Nikon Corporation
- 当前专利权人： Nikon Corporation
- 当前专利权人地址： JP Tokyo
- 优先权： JP2004-335050 20041118
- 主分类号： G03B27/52
- IPC分类号： G03B27/52
摘要：
A part of a plate of a predetermined shape detachably mounted on a moving body is detected by an alignment system while the position of the moving body is measured by a measurement unit that sets a movement coordinate system of the movement body, and based on the detection results and the measurement results of the measurement unit corresponding to the detection results, position information of an outer periphery edge of the plate is obtained. Therefore, even if there are no alignment marks on the moving body for position measurement, the position of the plate, or in other words, the position of the moving body can be controlled on the movement coordinate system set by the measurement unit, based on the position information of the outer periphery edge of the plate.
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