发明申请
- 专利标题： TFT array panel and fabricating method thereof
- 专利标题（中）： TFT阵列面板及其制造方法
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申请号： US11328820申请日： 2006-01-09
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公开(公告)号： US20060163741A1公开(公告)日： 2006-07-27
- 发明人: Yang-ho Bae , Je-hun Lee , Beom-seok Cho , Chang-oh Jeong
- 申请人： Yang-ho Bae , Je-hun Lee , Beom-seok Cho , Chang-oh Jeong
- 优先权： KR10-2005-0001797 20050107
- 主分类号： H01L23/48
- IPC分类号： H01L23/48
摘要：
A TFT array panel including a lower aluminum layer, an aluminum nitride layer formed on the lower aluminum layer, and an upper aluminum layer formed on the aluminum nitride layer is presented. This TFT array panel including an aluminum wiring line reduces or even prevents the formation of a hillock that could create a short circuit. Also presented is a method of fabricating such TFT array panel.