发明申请
- 专利标题: Resist composition and pattern forming method using the same
- 专利标题(中): 抗蚀剂组合物和图案形成方法使用其
-
申请号: US11336912申请日: 2006-01-23
-
公开(公告)号: US20060172226A1公开(公告)日: 2006-08-03
- 发明人: Kazuyoshi Mizutani
- 申请人: Kazuyoshi Mizutani
- 专利权人: FUJI PHOTO FILM CO., LTD.
- 当前专利权人: FUJI PHOTO FILM CO., LTD.
- 优先权: JPP.2005-026780 20050202
- 主分类号: G03C1/76
- IPC分类号: G03C1/76
摘要:
A resist composition comprising (A) an acid generator represented by formula (1): wherein S1 to S8 each independently represents a substituent; a, n, m, l, k, o, p, q and r each independently represents an integer of 0 to 2; X represents a single bond or a divalent linking group; R1 and R2 each independently represents a hydrogen atom or a substituent, and R1 and R2 may combine with each other to represent a single bond or a divalent linking group; and Y− and Z− each independently represents an organic sulfonate anion.
信息查询