发明申请
US20060172226A1 Resist composition and pattern forming method using the same 审中-公开
抗蚀剂组合物和图案形成方法使用其

Resist composition and pattern forming method using the same
摘要:
A resist composition comprising (A) an acid generator represented by formula (1): wherein S1 to S8 each independently represents a substituent; a, n, m, l, k, o, p, q and r each independently represents an integer of 0 to 2; X represents a single bond or a divalent linking group; R1 and R2 each independently represents a hydrogen atom or a substituent, and R1 and R2 may combine with each other to represent a single bond or a divalent linking group; and Y− and Z− each independently represents an organic sulfonate anion.
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