- 专利标题: Calibration cassette pod for robot teaching and method of using
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申请号: US11370540申请日: 2006-03-07
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公开(公告)号: US20060184270A1公开(公告)日: 2006-08-17
- 发明人: Kuo-Hsing Teng , Fu-Shun Lo , Yi-Chang Tsai
- 申请人: Kuo-Hsing Teng , Fu-Shun Lo , Yi-Chang Tsai
- 申请人地址: TW Hsin Chu
- 专利权人: Taiwan Semiconductor Manufacturing Co., Ltd.
- 当前专利权人: Taiwan Semiconductor Manufacturing Co., Ltd.
- 当前专利权人地址: TW Hsin Chu
- 主分类号: G01B11/00
- IPC分类号: G01B11/00
摘要:
A calibration cassette pod for robot teaching and a method of using the calibration cassette pod are described. In the calibration cassette pod, a cassette pod body and a cassette pod door are first provided wherein the cassette pod body is constructed of a top panel, a bottom panel, two side panels and a front panel to enclose a cavity therein. A first plurality of ribs is formed on an inside surface of the cassette pod body, each having a predetermined depth sufficient to support an edge portion of a wafer. An optical detector housing is mounted on an opening in the front panel and is adapted for receiving an optical detector therein. An optical detector that includes a light emission source and a photo diode receiver for determining the position of the edge portion of the wafer is mounted in the optical detector housing.
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