发明申请
- 专利标题: Phase change memory devices employing cell diodes and methods of fabricating the same
- 专利标题(中): 使用单元二极管的相变存储器件及其制造方法
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申请号: US11324112申请日: 2005-12-30
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公开(公告)号: US20060186483A1公开(公告)日: 2006-08-24
- 发明人: Woo-Yeong Cho , Du-Eung Kim , Yun-Seung Shin , Hyun-Geun Byun , Sang-Beom Kang , Beak-Hyung Cho , Choong-Keun Kwak
- 申请人: Woo-Yeong Cho , Du-Eung Kim , Yun-Seung Shin , Hyun-Geun Byun , Sang-Beom Kang , Beak-Hyung Cho , Choong-Keun Kwak
- 专利权人: Samsung Electronics Co., Ltd.
- 当前专利权人: Samsung Electronics Co., Ltd.
- 优先权: KR10-2005-0015564 20050224
- 主分类号: H01L29/76
- IPC分类号: H01L29/76
摘要:
Phase change memory devices having cell diodes and related methods are provided, where the phase change memory devices include a semiconductor substrate of a first conductivity type and a plurality of parallel word lines disposed on the semiconductor substrate, the word lines have a second conductivity type different from the first conductivity type and have substantially flat top surfaces, a plurality of first semiconductor patterns are one-dimensionally arrayed on each word line along a length direction of the word line, the first semiconductor patterns have the first conductivity type or the second conductivity type, second semiconductor patterns having the first conductivity type are stacked on the first semiconductor patterns, an insulating layer is provided on the substrate having the second semiconductor patterns, the insulating layer fills gap regions between the word lines, gap regions between the first semiconductor patterns and gap regions between the second semiconductor patterns, a plurality of phase change material patterns are two-dimensionally arrayed on the insulating layer, and the phase change material patterns are electrically connected to the second semiconductor patterns, respectively.
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