发明申请
- 专利标题: Vibrating gyrosensor
- 专利标题(中): 振动陀螺传感器
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申请号: US11368144申请日: 2006-03-03
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公开(公告)号: US20060197414A1公开(公告)日: 2006-09-07
- 发明人: Kazuo Takahashi , Teruo Inaguma , Junichi Honda , Koji Suzuki , Shigeto Watanabe , Shin Sasaki , Eiji Nakashio , Manabu Aizawa
- 申请人: Kazuo Takahashi , Teruo Inaguma , Junichi Honda , Koji Suzuki , Shigeto Watanabe , Shin Sasaki , Eiji Nakashio , Manabu Aizawa
- 优先权: JPP2005-106718 20050304; JPP2005-063075 20050307; JPP2005-190234 20050629; JPP2005-374326 20051227
- 主分类号: H01L41/113
- IPC分类号: H01L41/113
摘要:
A vibrating gyrosensor includes a support substrate on which a wiring pattern having a plurality of lands is formed, and vibrating elements mounted on a surface of the support substrate, wherein at least two vibrating elements are mounted on the support substrate, for detecting vibrations in different axial directions.
公开/授权文献
- US07400078B2 Vibrating gyrosensor 公开/授权日:2008-07-15
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