发明申请
- 专利标题： Microelectromechanical system optical apparatus and method
- 专利标题（中）： 微机电系统光学装置及方法
-
申请号： US11080597申请日： 2005-03-15
-
公开(公告)号： US20060209385A1公开(公告)日： 2006-09-21
- 发明人: Junhua Liu , Aroon Tungare , Min-Xian Zhang
- 申请人： Junhua Liu , Aroon Tungare , Min-Xian Zhang
- 专利权人： Motorola, Inc.
- 当前专利权人： Motorola, Inc.
- 主分类号： G02B26/00
- IPC分类号： G02B26/00
摘要：
A microelectromechanical systems (MEMS) apparatus (100) having a footprint of about 1 to 10 millimeters by about 1 to 10 millimeters comprises a movable member (101) that can be stopped at either of at least two positions by electrically neutral stops (105, 107). Depending upon the needs of a given application, these stops may all be fabricated using materials deposition and removal techniques or some, though not all, may comprise an attached component.
公开/授权文献
- US07224512B2 Microelectromechanical system optical apparatus and method 公开/授权日：2007-05-29
信息查询
