发明申请
- 专利标题: Objective in a microlithographic projection exposure apparatus
- 专利标题(中): 目的在微光刻投影曝光装置
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申请号: US11443077申请日: 2006-05-31
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公开(公告)号: US20060215272A1公开(公告)日: 2006-09-28
- 发明人: Toralf Gruner , Hans-Jurgen Mann
- 申请人: Toralf Gruner , Hans-Jurgen Mann
- 专利权人: CARL ZEISS SMT AG
- 当前专利权人: CARL ZEISS SMT AG
- 优先权: DE10329793.6 20030701
- 主分类号: G02B3/00
- IPC分类号: G02B3/00
摘要:
An objective in a microlithographic projection exposure apparatus has a first optical element that has polarization dependent properties causing intensity fluctuations in an image plane of the objective. These fluctuations may be produced by a second optical element that is arranged downstream of the first optical element. A gray filter disposed in the beam path reduces the intensity fluctuations.
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