发明申请
US20060215272A1 Objective in a microlithographic projection exposure apparatus 审中-公开
目的在微光刻投影曝光装置

Objective in a microlithographic projection exposure apparatus
摘要:
An objective in a microlithographic projection exposure apparatus has a first optical element that has polarization dependent properties causing intensity fluctuations in an image plane of the objective. These fluctuations may be produced by a second optical element that is arranged downstream of the first optical element. A gray filter disposed in the beam path reduces the intensity fluctuations.
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