Invention Application
- Patent Title: Piezoelectric film laminate and method of manufacturing the same
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Application No.: US11389985Application Date: 2006-03-27
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Publication No.: US20060222895A1Publication Date: 2006-10-05
- Inventor: Takamitsu Higuchi , Takeshi Kijima , Mayumi Ueno
- Applicant: Takamitsu Higuchi , Takeshi Kijima , Mayumi Ueno
- Assignee: Seiko Epson Corporation
- Current Assignee: Seiko Epson Corporation
- Priority: JP2005-095554 20050329
- Main IPC: B05D5/12
- IPC: B05D5/12 ; B05D3/02
Abstract:
A piezoelectric film laminate including a sapphire substrate and a lead zirconate titanate niobate film and a potassium niobate film formed on the sapphire substrate.
Public/Granted literature
- US07601387B2 Piezoelectric film laminate and method of manufacturing the same Public/Granted day:2009-10-13
Information query
