A method of manufacturing an exhaust gas sensor includes providing a sensor element having an open end, a closed end, and an inner surface defining a chamber between the open and closed ends. The method further includes inserting a nozzle into the chamber, supplying an electrode material to the nozzle, and without substantially any relative movement between the nozzle and the sensor element, atomizing the electrode material to form a mist of electrode material that substantially surrounds the tip of the nozzle and deposits onto the inner surface of the sensor element to form an inner electrode.