发明申请
US20060237706A1 Non-volatile semiconductor memory and method for controlling a non-volatile semiconductor memory
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非挥发性半导体存储器和用于控制非易失性半导体存储器的方法
- 专利标题: Non-volatile semiconductor memory and method for controlling a non-volatile semiconductor memory
- 专利标题(中): 非挥发性半导体存储器和用于控制非易失性半导体存储器的方法
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申请号: US11396507申请日: 2006-04-05
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公开(公告)号: US20060237706A1公开(公告)日: 2006-10-26
- 发明人: Toshiyuki Enda , Hiroyoshi Tanimoto , Naoki Kusunoki , Nobutoshi Aoki , Fumitaka Arai , Riichiro Shirota
- 申请人: Toshiyuki Enda , Hiroyoshi Tanimoto , Naoki Kusunoki , Nobutoshi Aoki , Fumitaka Arai , Riichiro Shirota
- 申请人地址: JP Tokyo
- 专利权人: KABUSHIKI KAISHA TOSHIBA
- 当前专利权人: KABUSHIKI KAISHA TOSHIBA
- 当前专利权人地址: JP Tokyo
- 优先权: JPP2005-110373 20050406; JPP2005-115013 20050412
- 主分类号: H01L47/00
- IPC分类号: H01L47/00
摘要:
A non-volatile semiconductor memory including a plurality of memory cell transistors, each of the plurality of memory cell transistors includes: a source region having a first conductivity type and in contact with a buried insulating layer on a supporting substrate; a drain-region having the first conductivity type and in contact with the buried insulating layer; and a channel region having the first conductivity type and provided between the source region and the drain region so as to contact the buried insulating layer, wherein a thickness of the channel region is more than one nm and not more than a value obtained by adding seven nm to a half value of a gate length of the memory cell transistor.
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