发明申请
- 专利标题: Semiconductor memory component
- 专利标题(中): 半导体存储器组件
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申请号: US11438883申请日: 2006-05-23
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公开(公告)号: US20060267082A1公开(公告)日: 2006-11-30
- 发明人: Franz Hofmann , Richard Luyken , Wolfgang Roesner , Michael Specht , Martin Staedele
- 申请人: Franz Hofmann , Richard Luyken , Wolfgang Roesner , Michael Specht , Martin Staedele
- 优先权: DE102005024951.5-33 20050531
- 主分类号: H01L29/76
- IPC分类号: H01L29/76
摘要:
A semiconductor memory component comprises at least one memory cell. The memory cell comprises a semiconductor body comprised of a body region, a drain region and a source region, a gate dielectric, and a gate electrode. The body region comprises a first conductivity type and a depression between the source and drain regions, and the source and drain regions comprise a second conductivity type. The gate electrode is arranged at least partly in the depression and is insulated from the body, source, and drain regions by the gate dielectric. The body region further comprises a first continuous region with a first dopant concentration and a second continuous region with a second dopant concentration greater than the first dopant concentration. The first continuous region adjoins the drain region, the depression and the source region, and the second region is arranged below the first region and adjoins the first region.
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