发明申请
US20060274995A1 Temperature-insensitive polymeric optical AWG device and manufacturing method therefor
失效
温度不敏感的聚合物光学AWG器件及其制造方法
- 专利标题: Temperature-insensitive polymeric optical AWG device and manufacturing method therefor
- 专利标题(中): 温度不敏感的聚合物光学AWG器件及其制造方法
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申请号: US11361204申请日: 2006-02-23
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公开(公告)号: US20060274995A1公开(公告)日: 2006-12-07
- 发明人: Jong Lee , Sun Park , Yong Baek
- 申请人: Jong Lee , Sun Park , Yong Baek
- 专利权人: Electronics and Telecommunications Research Institute
- 当前专利权人: Electronics and Telecommunications Research Institute
- 优先权: KR10-2005-0047918 20050603
- 主分类号: G02B6/34
- IPC分类号: G02B6/34
摘要:
Provided are a temperature-insensitive polymeric optical AWG device and a method of manufacturing the same. The temperature-insensitive polymeric optical AWG device includes: a substrate; an input waveguide formed on the substrate; an output waveguide formed on the substrate so as to correspond to the input waveguide; polymeric grating channel waveguides interposed between free propagation slab regions on the substrate between the input and output waveguides and having difference lengths; a plurality of hollow trenches formed by selectively etching a surface of the substrate under the polymeric grating channel waveguides and allowing the polymeric grating channel waveguides to freely thermally expand from the substrate depending on a temperature variation so as to compensate for refractive indexes of the polymeric grating channel waveguides varying with the temperature variation; and a shield layer shielding entrances of the hollow trenches so that the polymeric grating channel waveguides do not flow into the hollow trenches, so as to separate the polymeric grating channel waveguides from the substrate.
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