发明申请
US20060291097A1 MAGNETIC SENSING ELEMENT HAVING REACTIVE-ION-ETCHING STOP LAYER AND PROCESS FOR PRODUCING SAME 有权
具有反应性离子蚀刻停止层的磁感应元件及其制造方法

MAGNETIC SENSING ELEMENT HAVING REACTIVE-ION-ETCHING STOP LAYER AND PROCESS FOR PRODUCING SAME
摘要:
A magnetic sensing element including a laminate and a bias layer is provided. A first reactive-ion-etching (RIE) stop layer is disposed on a free magnetic layer. Second RIE stop layers are disposed on bias layers. The first and second RIE stop layers function as stop layers when layers on the first and second RIE stop layers are removed by reactive ion etching in a production process. Reactive ion etching is completed when the first RIE stop layer and the second RIE stop layers are exposed, the first and second RIE stop layers being disposed at almost the same height. Also provided is a process for producing the magnetic sensing element.
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