发明申请
US20060291097A1 MAGNETIC SENSING ELEMENT HAVING REACTIVE-ION-ETCHING STOP LAYER AND PROCESS FOR PRODUCING SAME
有权
具有反应性离子蚀刻停止层的磁感应元件及其制造方法
- 专利标题: MAGNETIC SENSING ELEMENT HAVING REACTIVE-ION-ETCHING STOP LAYER AND PROCESS FOR PRODUCING SAME
- 专利标题(中): 具有反应性离子蚀刻停止层的磁感应元件及其制造方法
-
申请号: US11424495申请日: 2006-06-15
-
公开(公告)号: US20060291097A1公开(公告)日: 2006-12-28
- 发明人: Kenji Honda , Naohiro Ishibashi , Daigo Aoki , Yasuo Hayakawa , Yoshihiro Nishiyama , Toshihiro Kobayashi
- 申请人: Kenji Honda , Naohiro Ishibashi , Daigo Aoki , Yasuo Hayakawa , Yoshihiro Nishiyama , Toshihiro Kobayashi
- 申请人地址: JP Tokyo
- 专利权人: ALPS ELECTRIC CO., LTD.
- 当前专利权人: ALPS ELECTRIC CO., LTD.
- 当前专利权人地址: JP Tokyo
- 优先权: JP2005-181376 20050622
- 主分类号: G11B5/147
- IPC分类号: G11B5/147 ; G11B5/33
摘要:
A magnetic sensing element including a laminate and a bias layer is provided. A first reactive-ion-etching (RIE) stop layer is disposed on a free magnetic layer. Second RIE stop layers are disposed on bias layers. The first and second RIE stop layers function as stop layers when layers on the first and second RIE stop layers are removed by reactive ion etching in a production process. Reactive ion etching is completed when the first RIE stop layer and the second RIE stop layers are exposed, the first and second RIE stop layers being disposed at almost the same height. Also provided is a process for producing the magnetic sensing element.
公开/授权文献
信息查询
IPC分类: