发明申请
- 专利标题: Image display device
- 专利标题(中): 图像显示装置
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申请号: US11472397申请日: 2006-06-22
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公开(公告)号: US20070001593A1公开(公告)日: 2007-01-04
- 发明人: Masakazu Sagawa , Hiroshi Kikuchi , Yukio Takasaki , Tomoki Nakamura , Toshiaki Kusunoki , Kazutaka Tsuji
- 申请人: Masakazu Sagawa , Hiroshi Kikuchi , Yukio Takasaki , Tomoki Nakamura , Toshiaki Kusunoki , Kazutaka Tsuji
- 优先权: JP2005-181459 20050622
- 主分类号: H01J1/62
- IPC分类号: H01J1/62
摘要:
The present invention provides an image display device, in which a top electrode is selectively separated by laser ablation for each scan line. As the laser, a third harmonic wave of YAG laser with a wavelength of 355 nm is used. By setting film thickness of the interlayer insulator 15 to 100 nm and film thickness of a field insulator 14 to 140 nm, reflective spectrum has the minimum value near a wavelength of 355 nm, This laser beam is projected from a top electrode 13 toward a substrate 10. A part of the projected laser beam 20 is reflected by the top electrode 13, but most of the laser beam pass through a field insulator 14 and the interlayer insulator 15 and is reflected by a bottom electrode 11. As the result of interference of these two reflection waves, the minimum value appears in reflection spectrum. In this case, the laser beam is mostly absorbed near boundary surface between the top electrode 13 and the interlayer insulator 15. The top electrode 13 is processed by ablation (melting and evaporation), and the top electrode 13 is separated at this portion. By utilizing interference phenomenon in this manner, no damage is given to the interlayer insulator 13, the field insulator 14, and the bottom electrode 11, which serve as underlying layers, and the top electrode 13 can be selectively cut off.
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