In one embodiment of the present invention, a technique is provided to control leakage of a cache sub-array. Other embodiments are disclosed herein. A sleep and shut-off circuit is connected between a virtual supply terminal and a first physical supply terminal to reduce leakage from the cache sub-array when the cache sub-array is disabled in a shut-off mode. The cache sub-array is connected between the virtual supply terminal and a second physical supply terminal. An active circuit is connected to the sleep and shut-off circuit in parallel to enable the cache sub-array in a normal mode and to disable the cache sub-array in the shut-off mode.