发明申请
- 专利标题: MULTI-STABLE MICRO ELECTROMECHANICAL SWITCHES AND METHODS OF FABRICATING SAME
- 专利标题(中): 多稳态微机电开关及其制造方法
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申请号: US11532689申请日: 2006-09-18
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公开(公告)号: US20070009203A1公开(公告)日: 2007-01-11
- 发明人: Rogier Receveur , Philippe Habets , Ralph Danzl , Richard Houben , Michael Mattes
- 申请人: Rogier Receveur , Philippe Habets , Ralph Danzl , Richard Houben , Michael Mattes
- 主分类号: G02B6/26
- IPC分类号: G02B6/26
摘要:
A micro electromechanical (MEMS) switch suitable for use in medical devices is provided, along with methods of producing and using MEMS switches. In one aspect, a micro electromechanical switch including a moveable member configured to electrically cooperate with a receiving terminal is formed on a substrate. The moveable member and the receiving terminal each include an insulating layer proximate to the substrate and a conducting layer proximate to the insulating layer opposite the substrate. In various embodiments, the conducting layers of the moveable member and/or receiving terminal include a protruding region that extends outward from the substrate to switchably couple the conducting layers of the moveable member and the receiving terminal to thereby form a switch. The switch may be actuated using, for example, electrostatic energy.