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    Monolithic electrodes and pH transducers
    3.
    发明授权
    Monolithic electrodes and pH transducers 有权
    单片电极和pH传感器

    公开(公告)号：US08728289B2

    公开(公告)日：2014-05-20

    申请号：US11304065

    申请日：2005-12-15

    申请人： David A. Dinsmoor ,  Michael F. Mattes ,  Rogier Receveur ,  Arun K. Gupta

    发明人： David A. Dinsmoor ,  Michael F. Mattes ,  Rogier Receveur ,  Arun K. Gupta

    IPC分类号： G01N27/333

    CPC分类号： G01N27/4035

    摘要： The disclosure provides monolithic electrodes including a substrate defining a walled cavity having a floor, an electrically conductive cathode layer overlaying the cavity floor, an electrically conductive contact pad overlaying the substrate, an electrically conductive via in electrical communication with the cathode layer and the contact pad, and a porous membrane layer overlaying the cavity and defining a chamber formed by the porous membrane layer, the walled cavity, and the cavity floor. The disclosure also provides pH transducers including monolithic indicator and reference electrodes, and methods of making and using monolithic pH electrodes and transducers.

    摘要翻译： 本公开提供了单片电极，其包括限定具有底板的壁腔的衬底，覆盖空腔底板的导电阴极层，覆盖衬底的导电接触垫，与阴极层和接触垫电连通的导电通孔 以及覆盖所述空腔并且限定由所述多孔膜层，所述壁腔和所述空腔底板形成的室的多孔膜层。 本公开还提供了包括单片指示剂和参比电极的pH换能器，以及制造和使用单片pH电极和换能器的方法。

    Wafer level hermetically sealed MEMS device
    6.
    发明授权
    Wafer level hermetically sealed MEMS device 有权
    晶圆级气密密封的MEMS器件

    公开(公告)号：US07816745B2

    公开(公告)日：2010-10-19

    申请号：US11066820

    申请日：2005-02-25

    申请人： Rogier Receveur ,  Cornel Marxer

    发明人： Rogier Receveur ,  Cornel Marxer

    IPC分类号： H01L23/10

    CPC分类号： B81C1/0023 ,  B81B7/007 ,  B81C2203/0109 ,  Y10T29/49105

    摘要： A hermetically sealed microelectromechanical system (MEMS) package includes a MEMS switch having a movable portion and a stationary portion with an electrical contact thereon. A glass lid is anodically bonded to the MEMS switch to form a sealed cavity over the movable portion of the MEMS switch. The glass lid includes a contact aperture to allow access to the electrical contact on the stationary portion of the MEMS switch. A family of body-implantable hermetically-sealed MEMS packages are provided according to certain aspects and embodiments of the present invention.

    摘要翻译： 密封的微机电系统（MEMS）封装包括具有可移动部分的MEMS开关和在其上具有电接触的固定部分。 玻璃盖阳极结合到MEMS开关，以在MEMS开关的可移动部分上形成密封空腔。 玻璃盖包括接触孔，以允许接近MEMS开关的固定部分上的电接触。 根据本发明的某些方面和实施例提供了一系列可植入人体的气密密封的MEMS封装。