发明申请
- 专利标题: PROBING PADS IN KERF AREA FOR WAFER TESTING
- 专利标题(中): 在KERF区域进行水分测试的探针垫
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申请号: US11160461申请日: 2005-06-24
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公开(公告)号: US20070013071A1公开(公告)日: 2007-01-18
- 发明人: James Adkisson , Timothy Daubenspeck , Jeffrey Gambino , Christopher Muzzy , Wolfgang Sauter
- 申请人: James Adkisson , Timothy Daubenspeck , Jeffrey Gambino , Christopher Muzzy , Wolfgang Sauter
- 申请人地址: US NY Armonk
- 专利权人: International Business Machines Corporation
- 当前专利权人: International Business Machines Corporation
- 当前专利权人地址: US NY Armonk
- 主分类号: H01L23/52
- IPC分类号: H01L23/52
摘要:
A structure and a method for forming the same. The structure includes (a) a substrate having a top substrate surface; (b) an integrated circuit on the top substrate surface, wherein the integrated circuit includes a bond pad electrically connected to a transistor of the integrated circuit; (c) a protection ring on the top substrate surface and on a perimeter of the integrated circuit; (c) a kerf region on the top substrate surface, wherein the protection ring is sandwiched between and physically isolates the integrated circuit and the kerf region, wherein the kerf region includes a probe pad electrically connected to the bond pad, and wherein the kerf region is adapted to be destroyed by chip dicing without damaging the integrated circuit and the protection ring.
公开/授权文献
- US07482675B2 Probing pads in kerf area for wafer testing 公开/授权日:2009-01-27
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