发明申请
- 专利标题: Process for forming an electronic device including discontinuous storage elements
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申请号: US11188939申请日: 2005-07-25
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公开(公告)号: US20070020857A1公开(公告)日: 2007-01-25
- 发明人: Gowrishankar L. Chindalore , Paul A. Ingersoll , Craig T. Swift
- 申请人: Gowrishankar L. Chindalore , Paul A. Ingersoll , Craig T. Swift
- 申请人地址: US TX Austin
- 专利权人: Freescale Semiconductor, Inc.
- 当前专利权人: Freescale Semiconductor, Inc.
- 当前专利权人地址: US TX Austin
- 主分类号: H01L21/336
- IPC分类号: H01L21/336
摘要:
A process for forming an electronic device can include forming a first trench within a substrate, wherein the trench includes a wall and a bottom and extends from a primary surface of the substrate. The process can also include forming discontinuous storage elements and forming a first gate electrode within the trench such that, a first discontinuous storage element of the discontinuous storage elements lies between the first gate electrode and the wall of the trench. The process can further include removing the discontinuous storage elements that overlie the primary surface of the substrate. The process can still further include forming a second gate electrode that overlies the first gate electrode and the primary surface of the substrate.
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