Invention Application
- Patent Title: Method of forming solder bump with reduced surface defects
- Patent Title (中): 形成具有减少的表面缺陷的焊料凸块的方法
-
Application No.: US11529377Application Date: 2006-09-29
-
Publication No.: US20070020913A1Publication Date: 2007-01-25
- Inventor: Se-Young Jeong , Jin-Hak Choi , Nam-Seog Kim , Kang-Wook Lee
- Applicant: Se-Young Jeong , Jin-Hak Choi , Nam-Seog Kim , Kang-Wook Lee
- Priority: KR2003-58003 20030821
- Main IPC: H01L21/44
- IPC: H01L21/44

Abstract:
A method of forming a solder bump may involve forming a first photoresist pattern on a wafer having a pad. The first photoresist pattern may have an opening that exposes a portion of the pad. A first under bump metallurgy (UBM) layer may be formed on the pad, and a second UBM layer may be formed on the first photoresist pattern. A second photoresist pattern may be formed that exposes the first UBM layer and covers the second UBM layer. A solder bump may be formed in the opening. The second photoresist pattern and the first photoresist pattern may be removed using a stripper, thereby removing the second UBM layer by a lift-off method.
Public/Granted literature
- US07553751B2 Method of forming solder bump with reduced surface defects Public/Granted day:2009-06-30
Information query
IPC分类: