Electret and electret capacitor

Invention Application

US20070029894A1 Electret and electret capacitor 有权

Title translation: 驻极体和驻极体电容器

Patent Title: Electret and electret capacitor
Patent Title (中): 驻极体和驻极体电容器
Application No.: US10576518

Application Date: 2004-11-12
Publication No.: US20070029894A1

Publication Date: 2007-02-08
Inventor: Tohru Yamaoka , Hiroshi Ogura , Yuichi Miyoshi , Tomoyuki Sasaki
Applicant: Tohru Yamaoka , Hiroshi Ogura , Yuichi Miyoshi , Tomoyuki Sasaki
Priority: JP2003-390554 20031120; JP2004-019616 20040128; JP2004-253894 20040901
International Application: PCT/JP04/16835 WO 20041112
Main IPC: H01L41/00
IPC: H01L41/00

Abstract:

A silicon nitride film (103) and a silicon nitride film (106) are formed to cover a charged silicon oxide film (105) serving as an electret.

Abstract(Chinese):

形成氮化硅膜（103）和氮化硅膜（106），以覆盖用作驻极体的带电氧化硅膜（105）。

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IPC分类:

H	电学
H01	基本电气元件
H01L	半导体器件；其他类目中不包括的电固体器件（使用半导体器件的测量入G01；一般电阻器入H01C；磁体、电感器、变压器入H01F；一般电容器入H01G；电解型器件入H01G9/00；电池组、蓄电池入H01M；波导管、谐振器或波导型线路入H01P；线路连接器、汇流器入H01R；受激发射器件入H01S；机电谐振器入H03H；扬声器、送话器、留声机拾音器或类似的声机电传感器入H04R；一般电光源入H05B；印刷电路、混合电路、电设备的外壳或结构零部件、电气元件的组件的制造入H05K；在具有特殊应用的电路中使用的半导体器件见应用相关的小类）
H01L41/00	一般压电器件；一般电致伸缩器件；一般磁致伸缩器件；专门适用于制造或处理这些器件或其部件的方法或设备；这些器件的零部件(由在一共用基片内或其上形成的多个固态组件组成的器件入H01L27/00)