发明申请
- 专利标题： Thin-film piezoelectric resonator
- 专利标题（中）： 薄膜压电谐振器
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申请号： US11583696申请日： 2006-10-20
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公开(公告)号： US20070035207A1公开(公告)日： 2007-02-15
- 发明人: Hideki Kawamura , Takahiro Oguchi , Keiichi Umeda , Hajime Yamada
- 申请人： Hideki Kawamura , Takahiro Oguchi , Keiichi Umeda , Hajime Yamada
- 专利权人： MURATA MANUFACTURING CO., LTD
- 当前专利权人： MURATA MANUFACTURING CO., LTD
- 优先权： JP2004-136940 20040430
- 主分类号： H01L41/08
- IPC分类号： H01L41/08
摘要：
A thin-film piezoelectric resonator having a thin-film portion with a piezoelectric thin film disposed between a pair of opposing electrodes, an insulating layer formed on one of the pair of electrodes of the thin-film portion, and a substrate supporting the other electrode of the thin-film portion. The thin-film portion and the insulating layer together vibrate in at least one mode of second and higher harmonic modes, and an antinode in the at least one mode of the second and higher harmonic modes is located in the insulating layer.
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