公开(公告)号：US08610516B2

公开(公告)日：2013-12-17

申请号：US12547633

申请日：2009-08-26

申请人： Keiichi Umeda

发明人： Keiichi Umeda

IPC分类号： H03H9/15 ,  H03H9/54

CPC分类号： H03H9/173 ,  H03H9/0095 ,  H03H9/0211 ,  H03H9/02118 ,  H03H9/132 ,  H03H9/174 ,  H03H9/175 ,  H03H9/564 ,  H03H9/568

摘要： A piezoelectric thin-film filter reduces insertion loss and deterioration of steepness of a shoulder characteristic and reduces the ripple in the passband. In a first vibration portion, a piezoelectric thin film is disposed between a pair of electrodes along one main surface of a substrate. In a second vibration portion, the piezoelectric thin film is disposed between a pair of electrodes along the one main surface of the substrate. The vibration portions are both acoustically isolated from the substrate. In the first resonator, an additional film is disposed outside the electrode constituting half or more the overall length of the perimeter of the first vibration portion that is in contact with the electrode when seen from a thickness direction. In the second resonator, the external shape of the vibration portion when seen from a thickness direction is a polygon, and each side of the polygon is not parallel with any of the other sides thereof.

摘要翻译： 压电薄膜滤波器减小了插入损耗和肩部特性的陡度的劣化，并且减小了通带中的纹波。 在第一振动部分中，压电薄膜沿着基板的一个主表面设置在一对电极之间。 在第二振动部分中，压电薄膜沿着基板的一个主表面设置在一对电极之间。 振动部分与基板隔声隔离。 在第一谐振器中，当从厚度方向观察时，另外的膜设置在电极的外部，构成与电极接触的第一振动部分的周边的总长度的一半以上。 在第二谐振器中，从厚度方向观察时的振动部的外形为多边形，多边形的各侧与其任一侧不平行。

公开(公告)号：US07868519B2

公开(公告)日：2011-01-11

申请号：US12714597

申请日：2010-03-01

申请人： Keiichi Umeda

发明人： Keiichi Umeda

IPC分类号： H01L41/04 ,  H01L41/08

CPC分类号： H03H9/175 ,  H03H3/02 ,  H03H9/02133

摘要： A piezoelectric resonator that achieves stable quality and improved resonance characteristics includes an acoustic reflector portion disposed between a substrate and a vibration portion, which includes a piezoelectric thin film sandwiched between a pair of electrodes, and a plurality of low acoustic impedance layers made of a material having relatively low acoustic impedance and a plurality of high acoustic impedance layers formed made of a material having relatively high acoustic impedance, the acoustic impedance layers being disposed alternately, and adjustment layers, which are disposed between the high acoustic impedance layers and the low acoustic impedance layers on the substrate sides of the high acoustic impedance layers and which have an acoustic impedance value intermediate between that of the high acoustic impedance layers and that of the low acoustic impedance layers. The low acoustic impedance layers and the high acoustic impedance layers have compressive stresses and the adjustment layers have a tensile stress.

摘要翻译： 实现稳定质量和改善的谐振特性的压电谐振器包括设置在基板和振动部分之间的声反射器部分，其包括夹在一对电极之间的压电薄膜和由材料制成的多个低声阻抗层 具有相对低的声阻抗和由具有较高声阻抗的材料形成的多个高声阻抗层，声阻抗层交替布置，调节层设置在高声阻抗层和低声阻抗之间 在高声阻抗层的衬底侧上的层，并且其声阻抗值介于高声阻抗层和低声阻抗层的声阻抗值之间。 低声阻抗层和高声阻抗层具有压缩应力，调整层具有拉伸应力。

公开(公告)号：US07649304B2

公开(公告)日：2010-01-19

申请号：US12211865

申请日：2008-09-17

申请人： Keiichi Umeda ,  Takashi Miyake

发明人： Keiichi Umeda ,  Takashi Miyake

IPC分类号： H01L41/08 ,  H03H9/25

CPC分类号： H03H9/564 ,  H03H3/04 ,  H03H9/02118 ,  H03H9/173 ,  H03H2003/0428 ,  H03H2003/0442 ,  H03H2003/0471

摘要： A piezoelectric resonator includes a laminated thin film having a first thin film portion supported by a substrate and a second thin film portion spaced apart from a first main surface of the substrate and acoustically isolated from the substrate. The second thin film portion of the laminated thin film includes a piezoelectric thin film, a first electrode disposed on the upper surface of the piezoelectric thin film, and a second electrode disposed on the lower surface of the piezoelectric thin film and being larger and thicker than the first electrode. The piezoelectric resonator further includes a mass adding film disposed around the first electrode and on at least one portion of a region extending outward from the periphery of a piezoelectric vibrating portion at which the first and second electrodes overlap each other with the piezoelectric thin film disposed therebetween. The second electrode arranged so as to extend beyond the piezoelectric vibrating portion to a region at which the mass adding film is disposed.

摘要翻译： 压电谐振器包括具有由衬底支撑的第一薄膜部分和与衬底的第一主表面间隔开并与衬底隔离的第二薄膜部分的叠层薄膜。 叠层薄膜的第二薄膜部分包括压电薄膜，设置在压电薄膜的上表面上的第一电极和设置在压电薄膜的下表面上的第二电极， 第一个电极。 压电谐振器还包括设置在第一电极周围的质量添加膜和在第一和第二电极彼此重叠的压电振动部分的外围向外延伸的区域的至少一部分，其中压电薄膜位于它们之间 。 所述第二电极被配置为延伸超过所述压电振动部分至配置所述质量添加​​膜的区域。

公开(公告)号：US07535154B2

公开(公告)日：2009-05-19

申请号：US12099880

申请日：2008-04-09

申请人： Keiichi Umeda ,  Hideki Kawamura

发明人： Keiichi Umeda ,  Hideki Kawamura

IPC分类号： H03H9/17 ,  H01L41/047

CPC分类号： H03H9/02086 ,  H03H9/02157 ,  H03H9/173 ,  H03H9/175 ,  H03H9/584 ,  H03H9/587

摘要： In a piezoelectric resonator, a portion of a thin film unit is supported by a substrate. A portion of the thin film unit acoustically isolated from the substrate includes a) a vibration unit and b) an additional film. The vibration unit includes a piezoelectric film sandwiched between a pair of electrodes. The piezoelectric film is overlapped with the pair of electrodes in plan view. The additional film is disposed on one of the piezoelectric film and the electrodes so as to extend along at least a portion of the periphery of the vibration unit. When x (MN·second/m3) denotes an acoustic impedance of the additional film defined by the square root of the product of the density and Young's modulus, A denotes the product of the density and the thickness of the additional film, B denotes the product of the densities and the thicknesses of the electrodes, and y=A/B, the following conditional expressions are satisfied: In the range of 9.0≦x

摘要翻译： 在压电谐振器中，薄膜单元的一部分被基板支撑。 从衬底声学隔离的薄膜单元的一部分包括a）振动单元和b）附加膜。 振动单元包括夹在一对电极之间的压电薄膜。 压电膜在平面图中与该对电极重叠。 附加膜设置在压电膜和电极中的一个上，以沿着振动单元的周边的至少一部分延伸。 当x（MN.second / m3）表示由密度和杨氏模量的乘积的平方根定义的附加膜的声阻抗时，A表示附加膜的密度和厚度的乘积，B表示 电极的密度和厚度的乘积以及y = A / B，满足以下条件表达式：<？in-line-formula description =“In-line formula”end =“lead”？> 9.0 <= x <44.0，0.0092.x + 0.88 <= y <0.067.x + 0.60（1a）<？在线公式描述=“在线公式”end =“tail”？> <？in -line-formula description =“In-line Formulas”end =“lead”？>在44.0 <= x <79.0，-0.0035.x + 1.45 <= y <0.015.x + 2.9（1b）的范围内。 ？in-line-formula description =“In-line Formulas”end =“tail”？>

公开(公告)号：US20090001848A1

公开(公告)日：2009-01-01

申请号：US12211865

申请日：2008-09-17

申请人： Keiichi UMEDA ,  Takashi MIYAKE

发明人： Keiichi UMEDA ,  Takashi MIYAKE

IPC分类号： H01L41/047

CPC分类号： H03H9/564 ,  H03H3/04 ,  H03H9/02118 ,  H03H9/173 ,  H03H2003/0428 ,  H03H2003/0442 ,  H03H2003/0471

摘要： A piezoelectric resonator includes a laminated thin film having a first thin film portion supported by a substrate and a second thin film portion spaced apart from a first main surface of the substrate and acoustically isolated from the substrate. The second thin film portion of the laminated thin film includes a piezoelectric thin film, a first electrode disposed on the upper surface of the piezoelectric thin film, and a second electrode disposed on the lower surface of the piezoelectric thin film and being larger and thicker than the first electrode. The piezoelectric resonator further includes a mass adding film disposed around the first electrode and on at least one portion of a region extending outward from the periphery of a piezoelectric vibrating portion at which the first and second electrodes overlap each other with the piezoelectric thin film disposed therebetween. The second electrode arranged so as to extend beyond the piezoelectric vibrating portion to a region at which the mass adding film is disposed.

摘要翻译： 压电谐振器包括具有由衬底支撑的第一薄膜部分和与衬底的第一主表面间隔开并与衬底隔离的第二薄膜部分的叠层薄膜。 叠层薄膜的第二薄膜部分包括压电薄膜，设置在压电薄膜的上表面上的第一电极和设置在压电薄膜的下表面上的第二电极， 第一个电极。 压电谐振器还包括设置在第一电极周围的质量添加膜和在第一和第二电极彼此重叠的压电振动部分的外围向外延伸的区域的至少一部分，其中压电薄膜位于它们之间 。 所述第二电极被配置为延伸超过所述压电振动部分至配置所述质量添加​​膜的区域。

公开(公告)号：US20080179995A1

公开(公告)日：2008-07-31

申请号：US12099880

申请日：2008-04-09

申请人： Keiichi UMEDA ,  Hideki KAWAMURA

发明人： Keiichi UMEDA ,  Hideki KAWAMURA

IPC分类号： H01L41/00

CPC分类号： H03H9/02086 ,  H03H9/02157 ,  H03H9/173 ,  H03H9/175 ,  H03H9/584 ,  H03H9/587

摘要： In a piezoelectric resonator, a portion of a thin film unit is supported by a substrate. A portion of the thin film unit acoustically isolated from the substrate includes a) a vibration unit and b) an additional film. The vibration unit includes a piezoelectric film sandwiched between a pair of electrodes. The piezoelectric film is overlapped with the pair of electrodes in plan view. The additional film is disposed on one of the piezoelectric film and the electrodes so as to extend along at least a portion of the periphery of the vibration unit. When x (MN·second/m3) denotes an acoustic impedance of the additional film defined by the square root of the product of the density and Young's modulus, A denotes the product of the density and the thickness of the additional film, B denotes the product of the densities and the thicknesses of the electrodes, and y=A/B, the following conditional expressions are satisfied:In the range of 9.0≦x

摘要翻译： 在压电谐振器中，薄膜单元的一部分被基板支撑。 从衬底声学隔离的薄膜单元的一部分包括a）振动单元和b）附加膜。 振动单元包括夹在一对电极之间的压电薄膜。 压电膜在平面图中与该对电极重叠。 附加膜设置在压电膜和电极中的一个上，以沿着振动单元的周边的至少一部分延伸。 当x（MN.second / m 3+）表示由密度和杨氏模量乘积的平方根定义的附加膜的声阻抗时，A表示密度和厚度的乘积 的附加膜，B表示电极的密度和厚度的乘积，y = A / B，满足以下条件表达式：在9.0 <= x <44.0的范围内， 公式description =“In-line Formulas”end =“lead”？> 0.0092.x + 0.88 <= y <0.067.x + 0.60（1a）<？in-line-formula description =“In-line Formulas”end = “tail”？>在44.0 <= x <79.0的范围内，<？in-line-formula description =“In-line Formulas”end =“lead”？> - 0.0035.x + 1.45 <= y <0.015。 x + 2.9。 （1b）<？in-line-formula description =“In-line Formulas”end =“tail”？>

公开(公告)号：US20080048803A1

公开(公告)日：2008-02-28

申请号：US11933720

申请日：2007-11-01

申请人： Keiichi Umeda ,  Hideki Kawamura

发明人： Keiichi Umeda ,  Hideki Kawamura

IPC分类号： H03H9/58

CPC分类号： H03H9/0095 ,  H03H9/009 ,  H03H9/6493

摘要： Providing is a piezoelectric thin-film filter including resonators connected in a lattice pattern, which can achieve large attenuation at frequencies away from a passband and improve steepness near two ends of the passband without involving an additional special step. Second resonators C—2 or first and third resonators C—1 and Cx—1 connected in parallel form series-arm resonators or parallel-arm resonators C—1 connected in a lattice pattern. The capacitance of each second resonator C—2 is larger than the capacitance of each first resonator C—1. The capacitance of each third resonator Cx—1 is substantially equal to the difference between the capacitance of the second resonator C—2 and the capacitance of the first resonator C—1. The resonant frequency of the first resonator C—1 higher than the resonant frequency of the second resonator C—2. The anti-resonant frequency of the third resonator Cx—1 is higher than the resonant frequency of the second resonator C—2 and lower than the resonant frequency of the first resonator C—1.

摘要翻译： 提供一种包括以格子图案连接的谐振器的压电薄膜滤波器，其可以在远离通带的频率处获得大的衰减，并且改善通带两端附近的陡度，而不需要额外的特殊步骤。 并联连接的第二谐振器C 2 - 2或第一和第三谐振器C 1 - 1和C x - 1串联臂谐振器或并联臂 以晶格图案连接的谐振器C 1 - 1。 每个第二谐振器C 2 - 2的电容大于每个第一谐振器C 1 - 1的电容。每个第三谐振器C x的电容 - 1基本上等于第二谐振器C 2 - 2的电容和第一谐振器C 1 - 1的电容之间的差。第一谐振器的谐振频率 高于第二谐振器C 2的谐振频率。第三谐振器Cx1的反谐振频率为 高于第二谐振器C 2 - 2的谐振频率并且低于第一谐振器C 1 - 2的谐振频率。

公开(公告)号：US07276836B2

公开(公告)日：2007-10-02

申请号：US11295444

申请日：2005-12-07

申请人： Keiichi Umeda ,  Osamu Nakagawara

发明人： Keiichi Umeda ,  Osamu Nakagawara

IPC分类号： H01L41/047 ,  H01L41/083 ,  H03H9/24

CPC分类号： H03H9/172 ,  H03H3/04 ,  H03H9/02149 ,  H03H9/131 ,  Y10T29/42

摘要： A piezoelectric thin-film resonator includes a first excitation electrode and a second excitation electrode, the first excitation electrode being disposed opposite the second excitation electrode; a piezoelectric thin film disposed between the first excitation electrode and the second excitation electrode; and a substrate supporting the first excitation electrode, the substrate being composed of a LiTaO3 single crystal or a LiNbO3 single crystal, the first excitation electrode including an acoustic reflecting layer, the acoustic reflecting layer containing (a) at least one epitaxially grown first sublayer being composed of a conducting material and having a relatively high acoustic impedance; and (b) at least one epitaxially grown second sublayer being composed of another conducting material and having a relatively low acoustic impedance.

摘要翻译： 压电薄膜谐振器包括第一激励电极和第二激励电极，第一激励电极与第二激励电极相对设置; 设置在所述第一激励电极和所述第二激励电极之间的压电薄膜; 以及支撑所述第一激发电极的基板，所述基板由LiTaO 3单晶或LiNbO 3 N 3单晶构成，所述第一激发电极包括声反射层， 所述声反射层包含（a）由导电材料构成且具有较高声阻抗的至少一个外延生长的第一子层; 和（b）至少一个外延生长的第二子层，由另一个导电材料组成并具有较低的声阻抗。

公开(公告)号：US20130170092A1

公开(公告)日：2013-07-04

申请号：US13535388

申请日：2012-06-28

申请人： Keiichi UMEDA

发明人： Keiichi UMEDA

IPC分类号： H01G7/00

CPC分类号： H01G7/00 ,  H01G5/16

摘要： A variable capacitance device includes a substrate, a beam portion, lower drive electrodes and upper drive electrodes. The beam portion is made of an insulating material and is connected to the substrate via an anchor portion. In the lower drive electrode and the upper drive electrode, electrostatic attraction generated by the application of a DC voltage continuously changes. In the lower drive electrodes and the upper drive electrode, electrostatic capacitance generated by the application of an RF signal between the electrodes on both sides continuously changes in accordance with the deformation of the beam portion due to the electrostatic attraction. The beam portion includes an inner circumferential portion including the upper drive electrode, an outer circumferential portion including the upper drive electrode, and ladder portions sandwiched by the inner circumferential portion and the outer circumferential portion. The beam portion has a cross-sectional area that is reduced by the ladder portions.

摘要翻译： 可变电容器件包括衬底，光束部分，下驱动电极和上驱动电极。 梁部分由绝缘材料制成，并通过锚定部分与基板连接。 在下驱动电极和上驱动电极中，施加直流电压产生的静电吸引力持续变化。 在下驱动电极和上驱动电极中，通过在两侧的电极之间施加RF信号产生的静电电容根据静电吸引而导致的光束部分的变形而连续变化。 梁部包括包括上驱动电极的内周部分，包括上驱动电极的外周部分和被内周部分和外周部分夹在中间的梯子部分。 梁部分具有由梯部减小的横截面积。

公开(公告)号：US07924120B2

公开(公告)日：2011-04-12

申请号：US12495889

申请日：2009-07-01

申请人： Keiichi Umeda

发明人： Keiichi Umeda

IPC分类号： H03H9/08 ,  H03H9/15 ,  H03H9/54

CPC分类号： H03H9/173 ,  H03H9/02102 ,  H03H9/175 ,  H03H9/564 ,  H03H9/568

摘要： A piezoelectric resonator includes a substrate and a thin-film section. The thin-film section includes a first thin-film section supported by the substrate, and an acoustically-isolated second thin-film section which is separated from the substrate. In the second thin-film section, first and second electrodes are arranged on the respective main surfaces of a piezoelectric film, and a vibration section is provided at an area where the first and the second electrodes overlap each other on the second thin-film section when viewed through in the film-thickness direction. The thin-film section further includes a heat-radiating film which is in contact with peripheral edges of at least the first electrode among the first and second electrodes defining portions of a periphery of the vibration section, and which extends from the peripheral edges to the first thin-film section when viewed through in the film-thickness direction.

摘要翻译： 压电谐振器包括基板和薄膜部分。 薄膜部分包括由基板支撑的第一薄膜部分和与基板分离的声隔离的第二薄膜部分。 在第二薄膜部分中，第一和第二电极布置在压电薄膜的各个主表面上，并且在第二薄膜部分上的第一和第二电极彼此重叠的区域处设置有振动部分 当沿膜厚度方向观察时。 所述薄膜部还包括与所述第一电极和所述第二电极中的至少第一电极的周缘接触的热辐射膜，所述第一电极和所述第二电极限定所述振动部的周边的部分，并且从所述周边延伸到 第一薄膜部分在膜厚度方向上观察。