发明申请
- 专利标题: Radiation sensitive resin composition
- 专利标题(中): 辐射敏感树脂组合物
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申请号: US11504809申请日: 2006-08-16
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公开(公告)号: US20070042292A1公开(公告)日: 2007-02-22
- 发明人: Eiji Yoneda , Hirokazu Sakakibara , Hiromitsu Nakashima , Hiroki Nakagawa , Yukio Nishimura
- 申请人: Eiji Yoneda , Hirokazu Sakakibara , Hiromitsu Nakashima , Hiroki Nakagawa , Yukio Nishimura
- 优先权: JP2005-236523 20050817; JP2006-189133 20060710
- 主分类号: G03C1/00
- IPC分类号: G03C1/00
摘要:
A radiation-sensitive resin composition which is a resist having properties such as excellent sensitivity, a small degree of line edge roughness of patterns, capability of inhibiting pattern collapsing, and the like is provided. The radiation-sensitive resin composition comprises an acid-dissociable group-containing polymer having recurring units of the following formulas (1-1) and (1-2), an additive of the following formula (1-3), and an acid generator, in the formula (1-1), R1 represents a methyl group and the like and X represents a specific polycyclic alicyclic hydrocarbon group and the like, in the formula (1-2), R1 represents a methyl group and the like and Z represents an acid-dissociable group which is dissociable by the action of an acid, and in the formula (1-3), n is an integer from 1-8 and A individually represents a hydroxyl group and the like.
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