发明申请
- 专利标题: Laser induced thermal imaging apparatus and manufacturing method of organic light emitting diode using the same
- 专利标题(中): 激光感应热成像装置及使用其的有机发光二极管的制造方法
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申请号: US11510372申请日: 2006-08-24
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公开(公告)号: US20070048657A1公开(公告)日: 2007-03-01
- 发明人: Sok Noh , Seong Lee , Mu Kim , Sun Kim , Myung Song , Jin Seong , Tae Kang , Jin Kim , Noh Kwak , Jae Lee
- 申请人: Sok Noh , Seong Lee , Mu Kim , Sun Kim , Myung Song , Jin Seong , Tae Kang , Jin Kim , Noh Kwak , Jae Lee
- 优先权: KR10-2005-109813 20051116; KR10-2005-80339 20050830; KR10-2005-80340 20050830
- 主分类号: G03C8/00
- IPC分类号: G03C8/00
摘要:
A laser induced thermal imaging apparatus and a manufacturing method of organic light emitting diodes using the same, which reduce or prevent the occurrence of impurities or void between an acceptor substrate and a donor film while performing a laser induced thermal imaging in a vacuum state. A laser induced thermal imaging apparatus includes: a substrate stage including an acceptor substrate for receiving an imaging layer, the imaging layer being formed on the acceptor substrate, and an electromagnet, a donor film having a permanent magnet being placed and laminated on the substrate stage, and the electromagnet forming a magnetic force with a permanent magnet of the donor film; a laser oscillator for irradiating a laser to the donor film; and a chamber having at least the substrate stage located therein.
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