发明申请
US20070048657A1 Laser induced thermal imaging apparatus and manufacturing method of organic light emitting diode using the same 有权
激光感应热成像装置及使用其的有机发光二极管的制造方法

Laser induced thermal imaging apparatus and manufacturing method of organic light emitting diode using the same
摘要:
A laser induced thermal imaging apparatus and a manufacturing method of organic light emitting diodes using the same, which reduce or prevent the occurrence of impurities or void between an acceptor substrate and a donor film while performing a laser induced thermal imaging in a vacuum state. A laser induced thermal imaging apparatus includes: a substrate stage including an acceptor substrate for receiving an imaging layer, the imaging layer being formed on the acceptor substrate, and an electromagnet, a donor film having a permanent magnet being placed and laminated on the substrate stage, and the electromagnet forming a magnetic force with a permanent magnet of the donor film; a laser oscillator for irradiating a laser to the donor film; and a chamber having at least the substrate stage located therein.
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