发明申请
- 专利标题: Laser induced thermal imaging apparatus and fabricating method of organic light emitting diode using the same
- 专利标题(中): 激光感应热成像装置及使用其的有机发光二极管的制造方法
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申请号: US11507792申请日: 2006-08-21
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公开(公告)号: US20070048893A1公开(公告)日: 2007-03-01
- 发明人: Sok Noh , Seong Lee , Mu Kim , Myung Song , Sun Kim , Jin Seong
- 申请人: Sok Noh , Seong Lee , Mu Kim , Myung Song , Sun Kim , Jin Seong
- 优先权: KR10-2005-80341 20050830; KR10-2005-80342 20050830; KR10-2005-80343 20050830; KR10-2005-80344 20050830; KR10-2005-80345 20050830; KR10-2005-80346 20050830
- 主分类号: H01L21/00
- IPC分类号: H01L21/00
摘要:
A laser induced thermal imaging apparatus and a fabricating method of organic light emitting diodes using the same, which laminate an acceptor substrate and a donor film using a magnetic force in vacuum, and are used to form a pixel array on the acceptor substrate. A substrate stage includes a magnet or magnetic substance. The acceptor substrate has a pixel region for forming first, second, and third sub-pixels, and the donor film has an organic light emission layer to be transferred to the pixel region. A laser oscillator irradiates a laser to the donor film. A contact frame is adapted to be disposed between the substrate stage and the laser oscillator, and is used to form a magnetic force with the substrate stage. The contact frame includes an opening through which the laser passes. A contact frame feed mechanism moves the contact frame in a direction of the substrate stage.
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