发明申请
- 专利标题: Methods for dual metal gate CMOS integration
- 专利标题(中): 双金属栅极CMOS集成方法
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申请号: US11212127申请日: 2005-08-25
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公开(公告)号: US20070048920A1公开(公告)日: 2007-03-01
- 发明人: Seung-Chul Song , Zhibo Zhang , Byoung Lee , Naim Moumen , Joel Barnett , Muhammad Hussain , Rino Choi , Husam Alshareef
- 申请人: Seung-Chul Song , Zhibo Zhang , Byoung Lee , Naim Moumen , Joel Barnett , Muhammad Hussain , Rino Choi , Husam Alshareef
- 专利权人: SEMATECH
- 当前专利权人: SEMATECH
- 主分类号: H01L21/8238
- IPC分类号: H01L21/8238 ; H01L21/8234 ; H01L21/4763 ; H01L21/3205
摘要:
Methods for fabricating two metal gate stacks for complementary metal oxide semiconductor (CMOS) devices are provided. A first metal layer may be deposited onto a gate dielectric. Next a mask layer may be deposited on the first metal layer and subsequently etch. The first metal layer is then etched. Without removing the mask layer, a second metal layer may be deposited. In one embodiment, the mask layer is a second metal layer. In other embodiments, the mask layer is a silicon layer. Subsequent fabrication steps include depositing another metal layer (e.g., another PMOS metal layer), depositing a cap, etching the cap to define gate stacks, and simultaneously etching the first and second gate region having a similar thickness with differing metal layers.
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