- 专利标题: Work function control of metals
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申请号: US11220451申请日: 2005-09-07
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公开(公告)号: US20070054446A1公开(公告)日: 2007-03-08
- 发明人: James Chambers , Mark Visokay , Luigi Colombo , Antonio Luis Rotondaro
- 申请人: James Chambers , Mark Visokay , Luigi Colombo , Antonio Luis Rotondaro
- 专利权人: Texas Instruments Incorporated
- 当前专利权人: Texas Instruments Incorporated
- 主分类号: H01L21/8234
- IPC分类号: H01L21/8234
摘要:
Forming metal gate transistors that have different work functions is disclosed. In one example, a first metal, which is a ‘mid gap’ metal, is manipulated in first and second regions by second and third metals, respectively, to move the work function of the first metal in opposite directions in the different regions. The resulting work functions in the different regions correspond to that of different types of the transistors that are to be formed.
公开/授权文献
- US07291527B2 Work function control of metals 公开/授权日:2007-11-06
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