发明申请
- 专利标题: Organic light emitting display and a deposition method
- 专利标题(中): 有机发光显示器和沉积方法
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申请号: US11501602申请日: 2006-08-08
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公开(公告)号: US20070057625A1公开(公告)日: 2007-03-15
- 发明人: Han Kim , Kyu Lee , Kyung Kim , Min Keum
- 申请人: Han Kim , Kyu Lee , Kyung Kim , Min Keum
- 优先权: KR10-2005-85413 20050913
- 主分类号: H01L51/52
- IPC分类号: H01L51/52 ; H01L51/56 ; C23C14/34
摘要:
Disclosed are an organic light emitting display and a deposition method for depositing an electrode or a passivation layer by means of a box cathode sputtering method or a facing target sputtering method by mixing Ar with an inert gas heavier than Ar gas. The present embodiments provide an organic light emitting display including a substrate; a thin film transistor formed on the substrate; a first electrode formed on the thin film transistor; an organic layer formed on the first electrode; and a second electrode layer sputter-deposited on the organic layer by mixing Ar gas with an inert gas heavier than said Ar using a box cathode sputtering method or a facing target sputtering method.
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