公开(公告)号：US20070057625A1

公开(公告)日：2007-03-15

申请号：US11501602

申请日：2006-08-08

申请人： Han Kim ,  Kyu Lee ,  Kyung Kim ,  Min Keum

发明人： Han Kim ,  Kyu Lee ,  Kyung Kim ,  Min Keum

IPC分类号： H01L51/52 ,  H01L51/56 ,  C23C14/34

CPC分类号： H01L27/3258 ,  C23C14/35 ,  C23C14/352 ,  H01L51/0021 ,  H01L51/5221

摘要： Disclosed are an organic light emitting display and a deposition method for depositing an electrode or a passivation layer by means of a box cathode sputtering method or a facing target sputtering method by mixing Ar with an inert gas heavier than Ar gas. The present embodiments provide an organic light emitting display including a substrate; a thin film transistor formed on the substrate; a first electrode formed on the thin film transistor; an organic layer formed on the first electrode; and a second electrode layer sputter-deposited on the organic layer by mixing Ar gas with an inert gas heavier than said Ar using a box cathode sputtering method or a facing target sputtering method.

摘要翻译： 公开了通过将Ar与比Ar气体重的惰性气体混合的方式，通过箱式阴极溅射法或面对靶溅射法沉积电极或钝化层的有机发光显示器和沉积方法。 本实施例提供一种包括基板的有机发光显示器; 形成在所述基板上的薄膜晶体管; 形成在薄膜晶体管上的第一电极; 形成在所述第一电极上的有机层; 以及通过使用箱式阴极溅射法或面对靶溅射法将Ar气体与比所述Ar重的惰性气体混合在有机层上溅射沉积的第二电极层。