发明申请
US20070060028A1 CMP SLURRY DELIVERY SYSTEM AND METHOD OF MIXING SLURRY THEREOF
审中-公开
CMP浆料输送系统及其混合浆料的方法
- 专利标题： CMP SLURRY DELIVERY SYSTEM AND METHOD OF MIXING SLURRY THEREOF
- 专利标题（中）： CMP浆料输送系统及其混合浆料的方法
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申请号： US11554569申请日： 2006-10-30
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公开(公告)号： US20070060028A1公开(公告)日： 2007-03-15
- 发明人: Sheng-Yu Chen , Te-Sung Hung , Chi-Piao Cheng , Chung-Jung Cheng , Kaung-Wu Nieh , Po-Yuan Cheng , Jiann-Fu Chen , Chun-Ting Hu , Tzu-Yu Tseng , Tzu-Yi Hsieh , Hung-Chi Pai , Yung-Chieh Kuo
- 申请人： Sheng-Yu Chen , Te-Sung Hung , Chi-Piao Cheng , Chung-Jung Cheng , Kaung-Wu Nieh , Po-Yuan Cheng , Jiann-Fu Chen , Chun-Ting Hu , Tzu-Yu Tseng , Tzu-Yi Hsieh , Hung-Chi Pai , Yung-Chieh Kuo
- 主分类号： B24B1/00
- IPC分类号： B24B1/00
摘要：
A CMP slurry delivery system includes a delivery pipe, a first slurry supply reservoir coupled to the delivery pipe for supplying an abrasive, a second slurry supply reservoir coupled to the delivery pipe for supplying a clean chemical, a third slurry supply reservoir coupled to the delivery pipe for supplying a corrosion inhibitor, and a fourth slurry supply reservoir for supplying an oxidizer.
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