发明申请
- 专利标题: Torque sensor
- 专利标题(中): 扭矩传感器
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申请号: US11233879申请日: 2005-09-23
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公开(公告)号: US20070068278A1公开(公告)日: 2007-03-29
- 发明人: James Liu , Steven Magee
- 申请人: James Liu , Steven Magee
- 专利权人: Honeywell International Inc.
- 当前专利权人: Honeywell International Inc.
- 主分类号: G01L1/22
- IPC分类号: G01L1/22
摘要:
A plurality of acoustic wave sensing devices can be provided, which are mechanically simulated for implementation upon a quartz wafer substrate. The quartz wafer substrate is appropriately etched to produce a quartz diaphragm from the quartz wafer substrate. A plurality of torque SAW sensing resonators can then be located upon the quartz wafer substrate, which is based upon previously mechanically simulated devices for implementation upon the substrate, together with a quartz cover to thereby produce a quartz torque sensor package from the quartz wafer substrate.
公开/授权文献
- US07302864B2 Torque sensor 公开/授权日:2007-12-04