Invention Application
- Patent Title: FORMING CLOSELY SPACED ELECTRODES
- Patent Title (中): 形成密闭电极
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Application No.: US11424655Application Date: 2006-06-16
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Publication No.: US20070069243A1Publication Date: 2007-03-29
- Inventor: Zhenan Bao , Jie Zheng , James Sturm , Troy Graves-Abe
- Applicant: Zhenan Bao , Jie Zheng , James Sturm , Troy Graves-Abe
- Applicant Address: US NJ Murray Hill US NJ Princeton
- Assignee: Lucent Technologies Inc.,Princeton University
- Current Assignee: Lucent Technologies Inc.,Princeton University
- Current Assignee Address: US NJ Murray Hill US NJ Princeton
- Main IPC: H01L29/76
- IPC: H01L29/76 ; B32B1/00

Abstract:
The present invention provides an apparatus and a method of fabricating the apparatus. The apparatus comprises a substrate having a planar surface and first and second electrodes located on the planar surface. The first electrode has a top surface and a lateral surface, and the lateral surface has an edge near or in contact with the substrate. An electrode insulating layer is located on the top surface and a self-assembled layer located on the lateral surface. The second electrode is in contact with both the self-assembled layer and the electrode insulating layer.
Public/Granted literature
- US07569416B2 Forming closely spaced electrodes Public/Granted day:2009-08-04
Information query
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