Invention Application
- Patent Title: MEMS Resonator
- Patent Title (中): MEMS谐振器
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Application No.: US11535807Application Date: 2006-09-27
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Publication No.: US20070070821A1Publication Date: 2007-03-29
- Inventor: Jason Weigold
- Applicant: Jason Weigold
- Applicant Address: US MA Norwood
- Assignee: ANALOG DEVICES, INC.
- Current Assignee: ANALOG DEVICES, INC.
- Current Assignee Address: US MA Norwood
- Main IPC: G04B17/00
- IPC: G04B17/00
Abstract:
A MEMS resonator has an outer element having an inner surface, the inner surface defining an area and a inner element coupled to the outer element and disposed within the area. The MEMS resonator also has an actuation electrode, in communication with the outer element, for generating electrostatic signals that cause the inner element to flex in a periodic manner.
Public/Granted literature
- US07633360B2 MEMS resonator having an inner element and an outer element that flex Public/Granted day:2009-12-15
Information query
