发明申请
US20070074578A1 System and method for sensing differential pressure 有权
用于感应差压的系统和方法

System and method for sensing differential pressure
摘要:
A differential pressure sensing system is provided. The sensing system includes a membrane layer having a channel extending diametrically therein, and including one or more cavities provided radially outbound of the channel and at least one resonant beam disposed in the channel and configured to oscillate at a desired frequency. The system further includes sensing circuitry configured to detect oscillation of the at least one resonant beam indicative of deformation in the membrane layer.
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